JPH03123572U - - Google Patents

Info

Publication number
JPH03123572U
JPH03123572U JP3139990U JP3139990U JPH03123572U JP H03123572 U JPH03123572 U JP H03123572U JP 3139990 U JP3139990 U JP 3139990U JP 3139990 U JP3139990 U JP 3139990U JP H03123572 U JPH03123572 U JP H03123572U
Authority
JP
Japan
Prior art keywords
coated
coating liquid
coating
chuck
coating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3139990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3139990U priority Critical patent/JPH03123572U/ja
Publication of JPH03123572U publication Critical patent/JPH03123572U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP3139990U 1990-03-27 1990-03-27 Pending JPH03123572U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3139990U JPH03123572U (en]) 1990-03-27 1990-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3139990U JPH03123572U (en]) 1990-03-27 1990-03-27

Publications (1)

Publication Number Publication Date
JPH03123572U true JPH03123572U (en]) 1991-12-16

Family

ID=31534153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3139990U Pending JPH03123572U (en]) 1990-03-27 1990-03-27

Country Status (1)

Country Link
JP (1) JPH03123572U (en])

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